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Process
and Machine Problems
A
line of multiple Tegal 901/903 machines runs various processes, such as
Nitride, VIA, Etchback, whereby the yields are very low and the overall
performance is inadequate, mainly as a result of poor end-point monitoring.
In addition, the machines on the line are limited to run non-critical etch
tasks only.
The
customer defined the problem as “…Chronic non-uniform etch problem…Generates
significant amount of scrap… “
The
table below shows the loss in a single month per one machine:
| Cost
of scrapped wafers - 300 wafers/month @ $300/wafer |
$90,000 |
| 20%
slow operation - 4800 wafers/month @$2/wafer |
$9600 |
| Extra
engineering work - 100 hours/month @ $100/hour |
$10,000 |
| Cost
of test wafers - 1 per lot, 600 wafers/month @ $20/wafer |
$12,000 |
| Use
of metrology equipment - 30 hours/month @ $500/hour |
$15,000 |
| Limited
to simple processes, lost time of other equipment, etc. |
?????? |
| Total
one month loss |
>
$136,600 |
The
TadiGuard Solutions
TadiVac
was installed for evaluation on one machine (out of the entire line). The
results were revolutionary. TadiVac2000 could easily, and accurately, detect
the occurrence of the end-point and halt the process precisely at the right
time. The scraps, tests, slow operation, extra engineering etc., were eliminated.
In
addition, the machine’s overall performance has been increased as a result
of full monitoring, diagnostics, better-planned maintenance, and more.
Ultimate
Results
-
Savings
of multi million dollars each month (on multiple machines).
-
Tegal
machines that were considered old and slow have been totally revived with
high yields, very high utilization, and prolonged life.
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Purchase
of new machines was eliminated due to these process steps.
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Major
capital investment was saved, all thanks to the TadiVac2000.
Over-All
Fab Yield, Capacity And Profitability Were Increased!
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