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What
is the SecSpy?
The SecSpy is a self-contained, independent
product that enables a user to collect, read, interpret and log SECS-II* protocol messages
that are being transferred between semiconductor equipment and a host computer using the
SECS-I (or HSMS version) communications standard*.
The SecSpy constitute a
small passive piggyback hardware module defined as the sniffer which is
connected in-line to the SECS-I RS-232
connection (either D9 or D25 connector) and a software package that can be run
as a standard MS-Windows applications.
The SecSpy gives the
engineers (process, equipment and maintenance) a direct access to the information from any desktop
computer without the need for access or support of a central system to interpret the data.
The SecSpy Connection Layout
The SecSpy's uses
Process follow-up
Process analysis
Maintenance event analysis
External data collection (Tadin's TadiGuard etc.)
The built-in tools such as filters, sorters,
interpreters etc. enable user defined manipulations and extracts.
The SecSpy product highlights
The SecSpy is used both in
Real-time and History.
The SecSpy output can be a display, a text file, a printout, a SML text file or a user-defined structured
ASCII file.
The SecSpy output data structure includes the
following fields:
The absolute
time of the message
The Device ID
The Stream and
Function
The
Transactions Definition
The Direction
(H>E or E>H)
The message
breakdown in various formats (Binary, Hex, Alpha, ASCII).
A user defined
format, using plain English definitions. (Lot #, Wafer #, Recipe, Error names, etc.)
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An structured text file in format similar to
SML (SECS Message Language).

Typical SecSpy
output and analysis screens (click to enlarge)
The SecSpy Operation flow
The SecSpy is optically
connected to both the T (Equip. to Host) and the R line (Host to Equip.) and it passively
reads the SECS transactions that are being transferred. It then passes the collected data
to the users computer port (RS-232 , USB or TCP/IP). Next, the
data pass a filter that only let pass transactions (Device, Streams and
Functions) that were set to be detected.
Next, the defined Streams
and Functions are being split-up and interpreted in accordance with the SECS-II protocol,
and transformed to hexadecimal, octal, binary and a readable text formats.
The messages are saved to
binary and text files, displayed or sent to an output file.
The
SecSpy data can further be integrated with or into any database is
various formats.

SECS-II data displayed in Hex, ASCII and SML.
(click to enlarge)
The SecSpy tools
The
SecSpy includes several tools that make its use easy and efficient.
¨ Filters: A set of filters enables to define only transactions
and machines of
interest to be detected and manipulated. The filters can be set to detect all transactions
(including non-standard ones), all but a few, a few only, etc. The different filters can
be used for filing, exporting and viewing.
¨ Sorting: The identified transactions can be sorted by any field:
Time (default), message type, direction,
message number, device ID, etc..
¨ Raw data display: Can display the raw data in various formats
(Binary, Hex, Alpha, ASCII) to enable manual user analysis.
¨ Export file: The user can define certain fields and give such
fields Names. The data will then be automatically attached to the names and sent to an
ASCII export SML file that can be read by external tools (such as MS-Excel,
etc.)
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