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Add-on a real-time watchdog and monitoring with graphic
display By adding an independent real-time data collection, display and analysis system with sophisticated alarm, errors are eliminated, historical analysis is enabled, and both historical and real-time data can be displayed. Can predict and alarm on temperature tweaking errors, wrong process, in-process heating element breakdown prediction, bad MFC, etc. Data can be selected by lot numbers, recipes, locations, full SPC on all parameters is available, remote access and tool-to-tool, batch-to-batch comparison, etc. Some typical screen examples: Typical CVD Process Profile MFC Zero-drift Typical 15-days, 42
runs MFC zero-drift test per run with alarm limits Temperature
Overlay Temperature Drift: Leak detection Temperature Distribution Heating Element health |
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